Determination of physical response in (Mo/ALN) saw devices
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- Título: Determination of physical response in (Mo/ALN) saw devices
- Autor: Pérez Taborda, Jaime Andrés; Caicedo, H; Caicedo, J. C; Riascos, Henry
- Publicación original: Surface Review and Letters, Vol. 20, No. 2, 2013
- Descripción física: PDF
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Nota general:
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This paper describes the experimental conditions in surface acoustic wave (SAW) designed on aluminum nitride (AlN) films grown on Si3 N 4 substrates by using pulsed laser deposition. Moreover it was studied the dependency of optical properties with temperature of deposition.
The thickness, measured by profilometry technology, was 150 nm for all films. Moreover, SAW devices with a Mo/AlN/Si3N4 configuration were fabricated employing AlN buffer and Mo Channel.
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This paper describes the experimental conditions in surface acoustic wave (SAW) designed on aluminum nitride (AlN) films grown on Si3 N 4 substrates by using pulsed laser deposition. Moreover it was studied the dependency of optical properties with temperature of deposition.
- Notas de reproducción original: Digitalización realizada por la Biblioteca Virtual del Banco de la República (Colombia)
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Notas:
- Resumen: Aluminum nitride; Color purity frequency response; Nitruro de aluminio; Ondas acústicas; Optical reflectance; Pulsed laser deposition; Surface acoustic wave
- © Derechos reservados del autor
- Colfuturo
- Forma/género: texto
- Idioma: inglés
- Institución origen: Biblioteca Virtual del Banco de la República
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